| 1. | In this thesis , we focus on dual axis capacitance vibration transducer , which was fabricated by micro - electromechanical systems ( mems ) . the operation mechanism of this kind of accelerometer was analyzed . under external acceleration , the space between sensitive quality mass and detecting electrode will change , which causes the variation of equivalent capacitance 本论文研究了采用微机械加工技术( mems )制作的双轴电容式振动传感器,其基本工作原理是利用惯性质量块在外界加速度的作用下与检测电极间的空隙发生改变,从而引起等效电容的变化来测定振动加速度的。 |